The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2005
Filed:
Jun. 28, 2002
Applicant:
Yoshihiro Morimoto, Aichi, JP;
Inventor:
Yoshihiro Morimoto, Aichi, JP;
Assignee:
Sanyo Electric Co., Ltd., , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L021/36 ;
U.S. Cl.
CPC ...
Abstract
An a-Si film formed on an insulating substrate is irradiated with a laser to obtain a p-Si film, which is then exposed to an oxidation atmosphere to form a surface oxide film. The surface oxide film is then removed to reduce the height of a projection generated on the surface of the p-Si film, thereby planarizing the surface of the p-Si film.