The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6875668 B1

PDF
Full Text
Expired
Date of Patent:
Apr. 05, 2005

Filed:

Jun. 24, 2002
Applicants:

Khanh Nguyen, Sunnyvale, CA (US);

Scott Bell, San Jose, CA (US);

Inventors:

Khanh Nguyen, Sunnyvale, CA (US);

Scott Bell, San Jose, CA (US);

Assignee:

Advanced Micro Devices, Inc., Sunnyvale, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L021/336 ; H01L021/8234 ;
U.S. Cl.
CPC ...
Abstract

Aspects for notched gate structure fabrication are described. The notched gate fabrication includes forming spacers of hard mask material on a gate conductor, and utilizing the spacers during etching to form notches in the gate conductor and provide a notched gate structure. In a further aspect, notched gate fabrication includes performing a timed etch of masked gate conductive material to maintain a portion of a gate conductive layer and provide gate structure areas in the gate conductive layer. Anisotropically etching the gate structure areas provides spacers on the gate structure areas. Isotropically etching the portion of the gate conductive layer provides notched gates in the gate structure areas.


Find Patent Forward Citations

Nguyen, Khanh. (2005). Notched gate structure fabrication (U.S. Patent No. 6875668). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6875668

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…