The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2005
Filed:
Mar. 04, 2003
Guillermo Toro-lira, Sunnyvale, CA (US);
Makoto Shinohara, Hadano, JP;
Takaharu Nishihara, Hadano, JP;
Guillermo Toro-Lira, Sunnyvale, CA (US);
Makoto Shinohara, Hadano, JP;
Takaharu Nishihara, Hadano, JP;
Shimadzu Corporation, Kyoto, JP;
Abstract
An apparatus for testing plural pixels arranged in a matrix array on a TFT substrate comprises an electron gun for incidenting the electron beam to the TFT substrate, a secondary electron detector for detecting the amount of secondary electrons generated by incidenting the electron beam to the TFT substrate, and a stage for carrying the TFT substrate which is held thereon. The electron gun is placed against the TFT substrate held on the stage and incidents the electron beam to each basic scanning area. The electron gun scans the electron beam in one basic scanning area a predetermined number of times to obtain a secondary electron waveform necessary for testing the presence/absence of a defect in the pixel. The stage is always moved while the electron gun scans the electron beam in each basic scanning area, whereby the entire area of the TFT substrate is tested.