The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 29, 2005

Filed:

Jan. 02, 2004
Applicants:

Wilhelm Asam, München, DE;

Josef Fazekas, München, DE;

Andreas Martin, München, DE;

David Smeets, München, DE;

Jochen Von Hagen, Kolbermoor, DE;

Inventors:

Wilhelm Asam, München, DE;

Josef Fazekas, München, DE;

Andreas Martin, München, DE;

David Smeets, München, DE;

Jochen Von Hagen, Kolbermoor, DE;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R031/27 ;
U.S. Cl.
CPC ...
Abstract

The invention relates to a device and a method for detecting the reliability of integrated semiconductor components. The device includes a carrier substrate for receiving an integrated semiconductor component that will be examined, a heating element, and a temperature sensor. The temperature sensor has at least a portion of a parasitic functional element of the semiconductor component. As a result, reliability tests can be carried out in a particularly accurate and space-saving manner.


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