The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2005
Filed:
Jan. 28, 2002
Gerry B. Andeen, Menlo Park, CA (US);
Martin E. Lee, Saratoga, CA (US);
N. William Parker, Fairfield, CA (US);
S. Daniel Miller, Gilroy, CA (US);
Gerry B. Andeen, Menlo Park, CA (US);
Martin E. Lee, Saratoga, CA (US);
N. William Parker, Fairfield, CA (US);
S. Daniel Miller, Gilroy, CA (US);
Multibeam Systems, Inc., Santa Clara, CA (US);
Motorla, Inc., Schaumburg, IL (US);
Abstract
A system for precisely positioning and moving a platform relative to a support structure is disclosed herein. The platform is particularly suitable for carrying wafers. Charged particle optics can be attached to the support structure. The platform positioning system comprises a stage, comprising a base, a platform and stage actuators, the stage actuators being coupled to the platform and the platform being coupled to the base; a frame attached to the base; a support structure mechanically coupled to the frame; stage sensors attached to the support structure, for sensing the position of the platform relative to the support structure; and a current control system coupled to the stage sensors and the stage actuators. The current control system may include a predictor for generating an ouptut signal anticipating the actual position of the platform relative to the support structure in real time.