The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2005
Filed:
Feb. 02, 2004
Yoshikazu Ibara, Gifu, JP;
Yoshikazu Ibara, Gifu, JP;
Sanyo Electric Co., Ltd., Osaka, JP;
Abstract
A method of fabricating a semiconductor device capable of suppressing defective etching in formation of a deep trench also when the number of polishing steps is reduced is obtained. This method of fabricating a semiconductor device comprises steps of forming a first trench on an element isolation region of a semiconductor substrate, forming a first film consisting of an insulator film to fill up the first trench, forming a second trench larger in depth than the first trench in the first trench, forming an embedded film in the second trench and substantially simultaneously polishing an excess depositional portion of the first film and an excess depositional portion of the embedded film.