The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2005
Filed:
Aug. 28, 2003
Peter Zurcher, Phoenix, AZ (US);
Rashaunda Monique Henderson, Chandler, AZ (US);
Sergio Palma Pacheco, Chandler, AZ (US);
Peter Zurcher, Phoenix, AZ (US);
Rashaunda Monique Henderson, Chandler, AZ (US);
Sergio Palma Pacheco, Chandler, AZ (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
An electromechanical resonator includes a substrate (), an anchor () coupled to the substrate, a beam () coupled to the anchor and suspended over the substrate, and a drive electrode () coupled to the substrate and separated from the beam by a gap (). The beam has a first surface (), a second surface (), and a third surface (). The first surface defines a width and a height, the second surface defines the height and a length, and the third surface defines the length and the width. The width, height, and length are substantially mutually perpendicular, and the beam resonates substantially only in compression mode and substantially only along an axis defined by the length.