The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2005
Filed:
Oct. 12, 2000
Applicants:
David A. Baldwin, Annandale, VA (US);
Boris Ciorneiu, Great Falls, VA (US);
Harold R. Kaufman, LaPorte, CO (US);
Inventors:
David A. Baldwin, Annandale, VA (US);
Boris Ciorneiu, Great Falls, VA (US);
Harold R. Kaufman, LaPorte, CO (US);
Assignees:
Kaufman & Robinson, Inc., Ft. Collins, CO (US);
Veeco Instruments Inc., Plainview, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J027/00 ;
U.S. Cl.
CPC ...
Abstract
In accordance with one specific embodiment of the present invention, a Hall-current ion source is operated in a pulsed mode where the pulse duration is short compared to the time for discharge fluctuations to develop. For a reduced loss of neutral gas, the time between pulses should be less than, or about equal to, the fill time for the ionizable gas in the discharge volume of the Hall-current ion source.