The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2005
Filed:
Jul. 30, 2001
Kyoichi Inaki, Tokorozawa, JP;
Naoto Watanabe, Sakado, JP;
Tohru Segawa, Koriyama, JP;
Hiroyuki Kimura, Takefu, JP;
Kyoichi Inaki, Tokorozawa, JP;
Naoto Watanabe, Sakado, JP;
Tohru Segawa, Koriyama, JP;
Hiroyuki Kimura, Takefu, JP;
Heraeus Quarzglas GmbH & Co. KG, Hanau, DE;
Shin-Etsu Quartz Products Co., Ltd., Tokyo, JP;
Abstract
An object of the present invention is to provide a quartz glass jig, which, when employed in a processing apparatus using plasma, is less in generation of abnormal etching and particles and low in contamination with impurities. This object is obtained by a quartz glass jig for a processing apparatus using plasma, wherein a surface of the jig is subjected to grinding or a sandblast processing and has a surface roughness Rin the range of from 2 μm to 0.05 μm, and microcracks of grinding marks formed during the grinding or sandblast processing have a depth of 50 μm or less.