The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2005
Filed:
Nov. 13, 2002
Applicants:
Oliver Gstoehl, Balzers, LI;
Mauro Pedrazzini, Vaduz, LI;
Inventors:
Oliver Gstoehl, Balzers, LI;
Mauro Pedrazzini, Vaduz, LI;
Assignee:
Unaxis Balzers Limited, Balzers, LI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C014/35 ;
U.S. Cl.
CPC ...
Abstract
The invention relates to an arc source or a source for vaporizing or sputtering of materials and a method for operating a source. The source comprises an insulated counter-electrode and/or an AC magnet system. Thereby, dependent on the requirement, any desired potential can be applied to the counter-electrode and/or the source can be operated with different magnet systems, in particular as arc or sputter source.