The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2005
Filed:
Oct. 23, 2003
Ronald G. Breese, Kalispell, MT (US);
C. James Bryer, Kalispell, MT (US);
Eric J. Bergman, Kalispell, MT (US);
Dana R. Scranton, Kalispell, MT (US);
Ronald G. Breese, Kalispell, MT (US);
C. James Bryer, Kalispell, MT (US);
Eric J. Bergman, Kalispell, MT (US);
Dana R. Scranton, Kalispell, MT (US);
Semitool, Inc., Kalispell, MT (US);
Abstract
In a method for cleaning for cleaning metallic ion contamination, and especially copper, from wafer containers, the containers are loaded into a cleaning apparatus. The containers are sprayed with a dilute chelating agent solution. The chelating agent solution removes metallic contamination from the containers. The containers are then rinsed with a rinsing liquid, such as deionized water and a surfactant. The containers are then dried, preferably by applying heat and/or hot air movement.