Method of laser-assisted fabrication of optoelectronic and photonic components

Abstract

The present invention provides a method for fabrication of integrated optical structures and micro-lenses on different substrates based on new process of laser-assisted deposition of optical materials on various crystalline or amorphous solid-state materials. The deposition of target material takes place as a result of interaction of the laser beam with the substrate surface being in direct contact with a liquid containing precursor of appropriate target material. In one preferred embodiment, the micro-lens is fabricated directly on optical fibers or light emitting devices providing improved light collimation as required for efficient laser-to-fiber pig tailing. In another preferred embodiment, the micro-lenses are fabricated on each active element of a laser diode array. The method can be used in all applications where controllable deposition of inorganic or organic materials on a solid state substrate is required, including chemical vapor deposition of thin films, fabrication of integrated optical, fiber-optical and micro-optical components for optoelectronic and photonic devices.