The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2005
Filed:
Mar. 01, 2002
Applicants:
Yoshihiro Yamashita, Chiba, JP;
Yoshihiro Enomoto, Chiba, JP;
Inventors:
Yoshihiro Yamashita, Chiba, JP;
Yoshihiro Enomoto, Chiba, JP;
Assignee:
Seiko Instruments Inc., Chiba, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G049/07 ;
U.S. Cl.
CPC ...
Abstract
A vacuum apparatus has a process chamber for processing a workpiece and a transfer apparatus for positioning the workpiece in the process chamber and for removing the workpiece from the process chamber. The transfer apparatus has a pair of generally parallel and spaced-apart transfer bodies and a workpiece holder connected to the transfer bodies for supporting the workpiece. A feeding mechanism feeds the transfer bodies in a longitudinal direction thereof to position the workpiece holder and the workpiece in the process chamber.