The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 15, 2005

Filed:

Nov. 19, 2003
Applicants:

Shogo Kosuge, Tachikawa, JP;

Masaru Nogami, Kodaira, JP;

Kiyoshi Iyori, Kodaira, JP;

Inventors:

Shogo Kosuge, Tachikawa, JP;

Masaru Nogami, Kodaira, JP;

Kiyoshi Iyori, Kodaira, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01C017/38 ; G01P021/00 ;
U.S. Cl.
CPC ...
Abstract

An alignment mark is sometimes undetectable even when part of it is visible with the eye. There is provided a pattern detecting method and an apparatus capable of detecting the alignment mark if part of it is visible. Thereby a position of the alignment mark can be detected. An image of a substantially whole of the alignment mark is registered as a representative image and besides at least one image of a part of the registered representative image is newly registered as a partial image. When any one of the registered representative image and the partial image is recognized. The pattern based on the alignment mark is detected. Thereby position coordinates can be recognized.


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