The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2005
Filed:
May. 10, 2002
Kenichiro Shinoda, Tochigi, JP;
Kenichiro Shinoda, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An illumination apparatus for using a beam emitted from a light source to illuminate an object area includes a condensing optical system for condensing the beam emitted from the light source, and a reflection type optical integrator located between the condensing optical system and the object area, the optical integrator having an m-gonal (where m is an even number) sectional shape, forming multiple pairs of opposing reflection surfaces, and reflecting the beam between the multiple pairs of opposing reflection surfaces, wherein a length L in an axial direction of the reflection type optical integrator meets the following equations: R=Φ/[tan {sin(sin θ/n)}]; and C×(A−0.1)×R≦L≦C×(A+0.1) X R, where n is a refractive index of a medium between the reflection surfaces, Φ is a distance between the reflection surfaces, θ is an angle of divergence when the beam emitted from the condensing optical system enters the reflection type optical integrator, C is a constant determined in relation to the sectional shape of the reflection type optical integrator, and A is a natural number.