The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2005
Filed:
May. 02, 2001
Applicants:
Wolfgang Singer, Aalen, DE;
Karl-heinz Schuster, Koenigsbronn, DE;
Inventors:
Wolfgang Singer, Aalen, DE;
Karl-Heinz Schuster, Koenigsbronn, DE;
Assignee:
Carl-Zeiss-Shiftung, Heidenheim, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B003/12 ; G03B027/68 ;
U.S. Cl.
CPC ...
Abstract
A projection lens (), in particular for microlithography, is provided with an object plane (), with an image plane (), with a lens arrangement () and with at least one gas chamber filled with gas or through which gas flows. The gas chamber is constructed as an approximately plane-parallel manipulation chamber (). The refractive index can be varied in the manipulation chamber () by pressure changes and/or changes in gas composition.