The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 15, 2005

Filed:

Nov. 27, 2002
Applicants:

Ken Kawarabata, Kawasaki, JP;

Jiro Mizuno, Yokohama, JP;

Inventors:

Ken Kawarabata, Kawasaki, JP;

Jiro Mizuno, Yokohama, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B021/00 ;
U.S. Cl.
CPC ...
Abstract

An ultraviolet microscope comprises an illumination optical system that guides ultraviolet light emitted from a light source to a specimen; and an observation optical system through which the specimen is observed. The illumination optical system and the observation optical system are set within an inert gas atmosphere.


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