The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2005
Filed:
May. 30, 2001
Applicants:
Kazunori Iwamoto, Tochigi, JP;
Toshiya Asano, Tochigi, JP;
Inventors:
Kazunori Iwamoto, Tochigi, JP;
Toshiya Asano, Tochigi, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B027/62 ; G03B027/58 ;
U.S. Cl.
CPC ...
Abstract
A stage apparatus includes a stage movable along at least one axis, a laser head for generating a laser beam, an optical unit which is mounted on the stage and splits the laser beam into reference and measurement beams, a mirror which is arranged outside the stage and reflects the measurement beam, and a detector which is arranged outside the stage and detects an interference beam of the reference and measurement beams.
Iwamoto, Kazunori. (2005). Stage apparatus which supports interferometer, stage position measurement method, projection exposure apparatus, projection exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory (U.S. Patent No. 6867849). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6867849
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile