The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 15, 2005

Filed:

Dec. 27, 2002
Applicants:

Woo Seok Yang, Daejon-Shi, KR;

Sung Weon Kang, Daejon-Shi, KR;

Yun Tae Kim, Daejon-Shi, KR;

Sung Hae Jung, Daejon-Shi, KR;

Inventors:

Woo Seok Yang, Daejon-Shi, KR;

Sung Weon Kang, Daejon-Shi, KR;

Yun Tae Kim, Daejon-Shi, KR;

Sung Hae Jung, Daejon-Shi, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L029/82 ;
U.S. Cl.
CPC ...
Abstract

The present invention relates to a capacitive micro-electro-mechanical switch and method of manufacturing the same. In the capacitive micro-electro-mechanical switch for use in the radio frequency (RF) and the microwave driven by the electrostatic force, a capacitor of a 3-dimensional structure is formed on a signal transmission line. An ON capacitance is increased without increasing an capacitor area while preventing an increase in an OFF capacitance using the capacitor. Thus, an ON/OFF capacitance ratio of the capacitive micro-electro-mechanical switch can be increased and insertion loss and isolation characteristic could be improved.


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