The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2005
Filed:
May. 21, 2002
Ruediger Held, Minneapolis, MN (US);
Ruediger Held, Minneapolis, MN (US);
Cypress Semiconductor Corp., San Jose, CA (US);
Abstract
A polishing system is provided which includes an o-ring adapted to couple a carrier ring to a carrier plate. In some embodiments, one component may include a groove with which to receive the o-ring and the other component may be substantially absent of a groove adapted to receive an o-ring. Alternatively, both components may include a groove with which to receive the o-ring. Consequently, a semiconductor polishing system component comprising a notch adapted to receive an o-ring is also provided herein. In particular, the semiconductor polishing system component may be adapted to couple to another semiconductor polishing system component by use of the o-ring. In addition, a method for assembling a semiconductor polishing system is contemplated herein, which includes positioning a first component of the semiconductor polishing system against a portion of an o-ring protruding from a groove arranged within a second component of the semiconductor polishing system.