The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2005
Filed:
May. 15, 2001
Shawn M. Cousineau, Hopkinton, MA (US);
Robert D. Kelso, Bridgewater, MA (US);
Douglas S. Olsen, Natick, MA (US);
David Stura, North Billerica, MA (US);
Shawn M. Cousineau, Hopkinton, MA (US);
Robert D. Kelso, Bridgewater, MA (US);
Douglas S. Olsen, Natick, MA (US);
David Stura, North Billerica, MA (US);
Temptronic Corporation, Sharon, MA (US);
Abstract
A system and method for controlling temperature in a workpiece chuck are described. A fluid circulation system circulates a temperature control fluid, such as an engineered HFE fluid, through te workpiece chuck. A fluid recovery system coupled to the fluid circulation system recovers a portion of the temperature control fluid from the fluid circulation system by circulating a gas through the fluid circulation system including fluid tubes and fluid passages in the chuck. The gas, which can be air, carries a portion of residual or excess fluid through the fluid circulation system as it is circulated. The residual fluid is carried back to a reservoir such that it can continue to be used to control temperature of the chuck. Where gas and temperature control fluid vapors are displaced from the reservoir, they are routed through a suction line heat exchanger which condenses the vapor. The gas and condensed fluid are separated in a fluid separator. The separated fluid is returned to the reservoir, and the separated air can be vented to the atmosphere.