The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 15, 2005

Filed:

Jun. 05, 2003
Applicants:

Michihiko Hayashi, Fukui, JP;

Hirofumi Tajika, Osaka, JP;

Masaya Nakatani, Hyogo, JP;

Inventors:

Michihiko Hayashi, Fukui, JP;

Hirofumi Tajika, Osaka, JP;

Masaya Nakatani, Hyogo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P009/04 ; H01L041/08 ;
U.S. Cl.
CPC ...
Abstract

An angular velocity sensor, which is able to reduce the variations of driving resonance frequency of the vibrator and to improve the reliability of the sensitivity of detection signal with respect to the angular velocity applied, is provided. The angular velocity sensor comprises a vibrator, and a tuning-fork as the vibrator is formed of a silicone substrate with crystal orientation (100) as its main face, and a side face nearly perpendicular to the driving direction (X direction) of the arm of the tuning-fork corresponds to a crystal orientation where the elastic modulus is less dependent on azimuth angle.


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