The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2005
Filed:
Jul. 23, 2004
Timothy J. Conway, Gainesville, VA (US);
Thomas J. Mcintyre, Nokesville, VA (US);
Andrew T S Pomerene, Leesburg, VA (US);
Timothy J. Conway, Gainesville, VA (US);
Thomas J. McIntyre, Nokesville, VA (US);
Andrew T S Pomerene, Leesburg, VA (US);
BAE Systems Information and Electronic Systems Integration Inc., Nashua, NH (US);
Abstract
For those optical waveguides that require the deposition of a thick film and a high-temperature anneal to create an appropriate waveguide medium, wafer warping, bowing or dishing is reduced or eliminated by depositing a film of the same thickness on the backside of the wafer so as to relieve film stress during the deposition and annealing process. In one embodiment the waveguide medium is silicon oxynitride, although other depositable thick films may be utilized in place of the silicon oxynitride.