The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2005
Filed:
Jun. 27, 2002
James H. Underwood, Martinez, CA (US);
Rupert C. C. Perera, Martinez, CA (US);
Phillip J. Batson, Alameda, CA (US);
James H. Underwood, Martinez, CA (US);
Rupert C. C. Perera, Martinez, CA (US);
Phillip J. Batson, Alameda, CA (US);
Other;
Abstract
A reflectometer device for determining the quality characteristics of an electronic chip mask blank utilizing a source of electromagnetic radiation in the extreme ultraviolet region. The source is passed to a monochrometer which includes a mirror, a rotatable grating, and an exit slit. The radiation travels to the mirror and is reflected to the grating which, in turn, provides a source of electromagnetic radiation which is essentially continuous and of a particular bandwidth. The grating is rotated to tune such source of electromagnetic radiation which is passed to the subject blank mask. Upon reflection from the mask, a detector determines the intensity of the reflected beam from the mask and translates such measurement into a determination of reflectivity.