The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 08, 2005

Filed:

May. 30, 2000
Applicants:

Rudolf Emmerich, Durmersheim, DE;

Mathias Kaiser, Karlsbad, DE;

Urban Helfried, Bretten, DE;

Peter Elsner, Pfinztal, DE;

Klaus Martin Baumgärtner, Grumbach, DE;

Eberhard Räuchle, Remseck, DE;

Konstantin Räuchle, Remseck, DE;

Inventors:

Rudolf Emmerich, Durmersheim, DE;

Mathias Kaiser, Karlsbad, DE;

Urban Helfried, Bretten, DE;

Peter Elsner, Pfinztal, DE;

Klaus Martin Baumgärtner, Grumbach, DE;

Eberhard Räuchle, Remseck, DE;

Konstantin Räuchle, Remseck, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H001/00 ; C23C016/00 ; H01L021/00 ;
U.S. Cl.
CPC ...
Abstract

The aim of the invention is to provide an alternative to the intensive treatment of a product, especially plasma treatment, in specific areas only. Towards this end, the invention provides a device for producing microwaves for treating workpieces, comprising at least one microwave antenna with an extended conductor for producing alternating electromagnetic fields, a housing that substantially extends over the length of the conductor, and an extended microwave decoupling area which follows the conductor and which is located in the housing. The housing is formed by at least one resonant cavity, which has a long shape and follows the course of the microwave antenna. The resonant cavity has at least one tapering, closed, first crown area and the decoupling area essentially extends in the focussing area of the resonant cavity. An at least non-divergent housing area adjoins the resonant cavity.


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