The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2005
Filed:
Nov. 03, 2000
Victor Krasnov, Tarzana, CA (US);
Kai-wei Nieh, Monrovia, CA (US);
Su-jen Ting, Encino, CA (US);
Paul Tang, Northridge, CA (US);
Fan-hsiu Chang, Miao-Li, TW;
Chun-ting Lin, Taichung, TW;
Victor Krasnov, Tarzana, CA (US);
Kai-Wei Nieh, Monrovia, CA (US);
Su-Jen Ting, Encino, CA (US);
Paul Tang, Northridge, CA (US);
Fan-Hsiu Chang, Miao-Li, TW;
Chun-Ting Lin, Taichung, TW;
Front Edge Technology, Inc., Baldwin Park, CA (US);
Abstract
A method of depositing lithium phosphorus oxynitride on a substrate, the method comprising loading a substrate into a vacuum chamber having a target comprising lithium phosphate, introducing a process gas comprising nitrogen into the chamber and maintaining the gas at a pressure of less than about 15 mTorr; and forming a plasma of the process gas in the chamber to deposit lithium phosphorous oxynitride on the substrate.