The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2005
Filed:
Mar. 05, 2004
Ho Joon Park, Seoul, KR;
Kyoung Soo Chae, Seoul, KR;
Ho Joon Park, Seoul, KR;
Kyoung Soo Chae, Seoul, KR;
Samsung Electro-Mechanics Co., Ltd., Kyungki-do, KR;
Abstract
Disclosed is a differential capacitive type MEMS sensor apparatus provided with a MEMS structure including a differential capacitive type MEMS sensor and a capacitance compensator having a MEMS structure. The differential capacitive type MEMS sensor apparatus includes a fixed frame unit including first and second fixed frames prepared in pairs, partially fixed to the MEMS base; a movable frame unit movably connected to the MEMS base substrate so that first capacitance is generated between the movable frame unit and the first fixed frame and second capacitance is generated between the movable frame unit and the second fixed frame; first capacitance compensating frame units serving to compensate for the first capacitance using capacitances generated between the movable frames and the movable electrodes; and second capacitance compensating frame units serving to compensate for the second capacitance using capacitances generated between the movable frames and the movable electrodes.