The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2005
Filed:
May. 24, 2000
Michael T. Duignan, Washington, DC (US);
Michael T. Duignan, Washington, DC (US);
Potomac Photonics, Inc., Lanham, MD (US);
Abstract
Apparatus () for performing patterned cleaning of substrate surfaces () includes substrate (), energetic beam () directed to the substrate (), material carrier element () having a deposition layer (), and a control unit () operating the apparatus () in either a 'material removal' or a 'material transfer' mode in a predetermined sequence. In the “material removal” mode, the following steps are followed which include the material carrier element () from the intersection with the energy beam () and allowing impinging of the energy beam () on the surface of the substrate in a predetermined patterned fashion so that the material of the substrate is disintegrated at predetermined locations of the substrate surface (). After the first cleaning, the control unit () changes the mode of the operation to the “material transfer” by moving the material carrier element () into position intersecting with the energy beam () so that the material of the deposition layer () is deposited on the surface of the substrate ().