The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2005
Filed:
Dec. 10, 2002
Suguru Akiyama, Kawasaki, JP;
Haruhisa Soda, Hachioji, JP;
Suguru Akiyama, Kawasaki, JP;
Haruhisa Soda, Hachioji, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A semiconductor optical modulator, a Mach-Zehnder optical modulator employing the same, and a method of manufacturing a semiconductor optical modulator that are suitable for high-speed baseband communication are provided. An optical waveguide core layer is formed in such a manner that it alternately crosses micro optical modulator elements and gap regions, which are formed by placing electrically insulating material at predetermined intervals on an electrically conductive substrate. The core layer is connected to a signal electrode portion via a conductive semiconductor portion in each micro optical modulator element. A ground electrode is connected to the core layer via the conductive substrate. Further, the signal electrode portions are connected in a series to form a signal electrode by means of in-between metal wirings. Conductive semiconductor material is located between the core layer and the electrodes. In the gap regions, the core layer is sandwiched between insulating semiconductor layers.