The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2005
Filed:
Mar. 06, 2001
Applicant:
Shin Matsui, Saitama, JP;
Inventor:
Shin Matsui, Saitama, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B027/58 ; G03B027/62 ;
U.S. Cl.
CPC ...
Abstract
A substrate holding device includes a base member capable of removably holding a plate having a contact member to come into contact with a substrate. The base member flatten-corrects the plate by suctioning the plate. The substrate holding device further includes a first attracting mechanism that attracts the substrate onto the plate in a status such that the plate is held on the base member, and a second attraction mechanism that attracts the plate onto the base member.