The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 01, 2005

Filed:

Jul. 01, 2003
Applicant:

Tadashi Chiba, Tokyo, JP;

Inventor:

Tadashi Chiba, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R027/26 ;
U.S. Cl.
CPC ...
Abstract

The capacity measuring device comprises a transistor () formed on a silicon substrate and having a drain, source, and gate regions (, and), extension metals () to be connected to the regions, a guard electrode () surrounding the extension metal () for the gate region, measurement pads () electrically connected to the extension metals, the guard rings () surrounding the measurement pads and connected to the guard electrode (). Accordingly, the infinitesimal capacity between any regions of the transistor in full scale is accurately measured by connecting the guard electrode () to a guard terminal of an infinitesimal capacity measuring apparatus for canceling the parasitic capacity.


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