The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2005
Filed:
Jan. 30, 2002
Applicants:
Minoru Kondo, Hamamatsu, JP;
Toshimitsu Nagai, Hamamatsu, JP;
Atsushi Kibune, Hamamatsu, JP;
Inventors:
Assignee:
Hamamatsu Photonics K.K., Hamamatsu, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03G015/00 ; G01N023/00 ; G21K007/00 ; G01K001/42 ; H01L031/113 ;
U.S. Cl.
CPC ...
Abstract
In an electron beam detector, a light guide optically couples a fluorescence emitting surface of the compound semiconductor substrate to a light incident surface of the photodetector, and physically connects the compound semiconductor substrate with the photodetector, thereby integrating the compound semiconductor substrate with the photodetector. When the compound semiconductor substrate converts incident electrons to fluorescent light, the light guide guides the fluorescent light to the photodetector, and the photodetector detects the fluorescent light, thereby detecting the incident electrons.