The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2005
Filed:
Dec. 13, 2002
Yehiel Gotkis, Fremont, CA (US);
Vladimir Katz, Fremont, CA (US);
David Hemker, San Jose, CA (US);
Rodney Kistler, Los Gatos, CA (US);
Nicolas J. Bright, San Jose, CA (US);
Yehiel Gotkis, Fremont, CA (US);
Vladimir Katz, Fremont, CA (US);
David Hemker, San Jose, CA (US);
Rodney Kistler, Los Gatos, CA (US);
Nicolas J. Bright, San Jose, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method for converting a slope based detection task to a threshold based detection task is provided. The method initiates with defining an approximation equation for a set of points corresponding to values of a process being monitored. Then, an expected value at a current point of the process being monitored is predicted. Next, a difference between a measured value at the current point of the process being monitored and the corresponding expected value is calculated. Then, the difference is monitored for successive points to detect a deviation value between the measured value and the expected value. Next, a transition point for the process being monitored is identified based on the detection of the deviation value. A processing system configured to provide real time data for a slope based transition and a computer readable media are also provided.