The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2005
Filed:
May. 31, 2001
Ib Johannsen, Vaerlose, DK;
Niels Bent Larsen, Copenhagen, DK;
Matthias Mullenborn, Lyngby, DK;
Pirmin Hermann Otto Rombach, Lyngby, DK;
Ib Johannsen, Vaerlose, DK;
Niels Bent Larsen, Copenhagen, DK;
Matthias Mullenborn, Lyngby, DK;
Pirmin Hermann Otto Rombach, Lyngby, DK;
Sonion Lyngby A/S, Lyngby-Tarbaek, DK;
Abstract
A method of providing at least part of a diaphragm and at least a part of a back-plate of a condenser microphone with a hydrophobic layer so as to avoid stiction between said diaphragm and said back-plate. The layer is deposited via a number small of openings in the back-plate, the diaphragm and/or between the diaphragm and the back-plate. Provides a homogeneous and structured hydrophobic layer, even to small internal cavities of the microstructure. The layer may be deposited by a liquid phase or a vapor phase deposition method. The method may be applied naturally in continuation of the normal manufacturing process. Further, a MEMS condenser microphone is provided having such a hydrophobic layer. The static distance between the diaphragm and the back-plate of the microphone is smaller than 10 μm.