The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2005
Filed:
May. 07, 2003
Hiroyuki Shirota, Kyoto, JP;
Akira Kuwabara, Kyoto, JP;
Hiroyuki Shirota, Kyoto, JP;
Akira Kuwabara, Kyoto, JP;
Dainippon Screen Mfg. Co., Ltd., Kyoto, JP;
Abstract
An image recording apparatus () has a stage unit () for holding a substrate (), an irradiation unit () having a plurality of irradiation parts () and a mechanism for relatively moving the stage unit () and the irradiation unit (). An irradiation part () is provided with a DMD having a group of micromirrors for modulating a reflected light beam and a micro moving mechanism for moving the DMD relatively to the irradiation unit () in the X direction, thereby microscopically moving an irradiation position of the irradiation part () in the X direction. The irradiation part () is further provided with a zoom lens, thereby magnifying and reducing an image of the DMD on the substrate (). By controlling a plurality of irradiation parts () parallelly and independently, the image recording apparatus () can write a fine pattern at high speed.