The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2005
Filed:
Dec. 03, 2002
Yasuo Yamaguchi, Tokyo, JP;
Teruya Fukaura, Fukuoka, JP;
Kunihiro Nakamura, Tokyo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
Provided is a method of manufacturing an acceleration sensor capable of preventing bonding of a movable electrode and a fixed electrode. A stain filmfor reducing bonding adsorption force is formed on side surfaces of a movable electrode, fixed electrodesandand a frame portionIn the case in which the movable electrodeand the fixed electrodesandare to be formed of a silicon substrate, it is preferable that an insulating film having irregular bonding of silicon atoms and oxygen atoms and irregular bonding of silicon atoms and nitrogen atoms should be employed for the stain filmfor example. The formation of the stain filmcan suppress the bonding between the movable electrodeand the fixed electrodesandeven if Coulomb force is generated between both electrodes when the silicon substrate and a back side substrateare joined by using an anode junction method.