The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2005
Filed:
May. 09, 2002
Applicants:
Shi-woo Rhee, Pohang-si, KR;
Sang-woo Kang, Seoul, KR;
Inventors:
Shi-Woo Rhee, Pohang-si, KR;
Sang-Woo Kang, Seoul, KR;
Assignee:
Postech Foundation, , KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C016/06 ; C23C016/14 ; C23C016/22 ;
U.S. Cl.
CPC ...
Abstract
A lanthanum complex of formula (I) having a low evaporation temperature can be used as a useful precursor for MOCVD of a BLT thin layer on semiconductor devices.wherein A is pentamethyldiethylenetriamine(PMDT) or triethoxytriethyleneamine(TETEA).
Quick Actions:
Rhee, Shi-Woo. (2005). Lanthanum complex and process for the preparation of a blt layer using same (U.S. Patent No. 6858251). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6858251
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile