The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 22, 2005

Filed:

Jan. 19, 2000
Applicants:

Peter Dress, Bruchsal, DE;

Karl Appich, Diefenbach, DE;

Peter Krauss, Sternenfeis, DE;

Jakob Szekeresch, Schönberg, DE;

Robert Weihing, Mühlacker, DE;

Inventors:

Peter Dress, Bruchsal, DE;

Karl Appich, Diefenbach, DE;

Peter Krauss, Sternenfeis, DE;

Jakob Szekeresch, Schönberg, DE;

Robert Weihing, Mühlacker, DE;

Assignee:

Steag Hama Tech AG, Sternenfels, DE;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C016/00 ; C23F001/00 ; H01L021/306 ;
U.S. Cl.
CPC ...
Abstract

To achieve a uniform coating of a substrate, with an apparatus and a method for coating substrates, according to which the substrate is supported on a substrate holder in such a way that a substrate surface that is to be coated is exposed, and the substrate is rotated together with the substrate holder, a cover can be secured to the substrate holder and together with the substrate holder forms a sealed chamber for the substrate.


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