The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2005
Filed:
May. 21, 2003
Chen-hua Lin, Yunlin Hsien, TW;
Wen-chung LU, Kaohsiung, TW;
Ming-hsun Yang, Taipei, TW;
Guey-chyuan Chen, Taoyuan, TW;
Chih-chieh Hsu, Hsinchu, TW;
Chen-Hua Lin, Yunlin Hsien, TW;
Wen-Chung Lu, Kaohsiung, TW;
Ming-Hsun Yang, Taipei, TW;
Guey-Chyuan Chen, Taoyuan, TW;
Chih-Chieh Hsu, Hsinchu, TW;
Nanodynamics, Inc., Hsinchu, TW;
Abstract
A method of manufacturing a piezoelectric ink-jet print-head uses a metallic layer and a thick film layer with a slot hole therein instead of a ceramic vibration plate and an ink layer. The piezoelectric layer and the upper electrode layer are formed inside the ink cavity so that overall thickness of the print head is reduced. To form the ink-jet print head, a metallic layer and a lower electrode layer are sequentially formed over a substrate. A patterned piezoelectric layer and an upper electrode layer are sequentially formed over the lower electrode layer. A patterned thick film layer with a slot hole therein is formed over the metallic layer. The thick film layer and the metallic layer together form a cavity that encloses the piezoelectric layer and the upper electrode layer. A nozzle plate having a nozzle thereon is attached to the thick film layer. The nozzle plate, the thick film layer and the metallic layer together form an ink cavity. The hole in the nozzle is continuous with the ink cavity.