The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2005
Filed:
Dec. 12, 2002
Applicant:
Anthony Dicarlo, Richardson, TX (US);
Inventor:
Anthony DiCarlo, Richardson, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
G02B026/00 ; G02B026/08 ;
U.S. Cl.
CPC ...
Abstract
A micromirror arrayfabricated on a semiconductor substrateThe arrayis comprised of three operating layersAn addressing layeris fabricated on the substrate. A hinge layeris spaced above the addressing layerby an air gap. A mirror layeris spaced over the hinge layerby a second air gap. The hinge layerhas a hingeunder and attached to the mirror, the hingepermitting the mirrorto tilt. Spring tipsunder the mirrorare attached to the underside of the mirror. These spring tipstilt with the mirrorand provide a landing point for the mirroronto a surface of the underlying pixel element structure.