The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2005
Filed:
Feb. 28, 2002
Applicant:
Christopher J. Raymond, Albuquerque, NM (US);
Inventor:
Christopher J. Raymond, Albuquerque, NM (US);
Assignee:
Accent Optical Technologies, Inc., Bend, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
G01B011/02 ; G01N021/88 ;
U.S. Cl.
CPC ...
Abstract
A method of and apparatus for measuring line profile asymmetries in microelectronic devices comprising directing light at an array of microelectronic features of a microelectronic device, detecting light scattered back from the array comprising either or both of one or more angles of reflection and one or more wavelengths, and comparing one or more characteristics of the back-scattered light by examining data from complementary angles of reflection or performing a model comparison.