The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 15, 2005

Filed:

Dec. 29, 2003
Applicants:

John C. Ehmke, Garland, TX (US);

Vincent C. Lopes, Lucas, TX (US);

John Paul Harris, Whitewright, TX (US);

Inventors:

John C. Ehmke, Garland, TX (US);

Vincent C. Lopes, Lucas, TX (US);

John Paul Harris, Whitewright, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L023/48 ; H01L023/52 ; H01L029/40 ;
U.S. Cl.
CPC ...
Abstract

A method of individually packaging a multiplicity of devices, such as a spatial light modulator, before the multiplicity of devices formed on a substrate wafer are separated. The method and structure comprises individually sealing each device while the device is still part of sealed by the combination interposer wafer and a cover or window wafer. After each device is sealed by the combination interposer wafer and cover wafer, the combination cover wafer is sawed through down to the substrate wafer. The sealed devices may then be fully separated by scoring and breaking the substrate wafer.


Find Patent Forward Citations

Ehmke, John. (2005). Method for fabricating a lid for a wafer level packaged optical mems device (U.S. Patent No. 6856014). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6856014

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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