The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 15, 2005

Filed:

Aug. 29, 2003
Applicants:

Takao Noguchi, Tokyo, JP;

Hisatoshi Saitou, Tokyo, JP;

Hidenori Abe, Tokyo, JP;

Yoshinari Yamashita, Tokyo, JP;

Inventors:

Takao Noguchi, Tokyo, JP;

Hisatoshi Saitou, Tokyo, JP;

Hidenori Abe, Tokyo, JP;

Yoshinari Yamashita, Tokyo, JP;

Assignee:

TDK Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L021/20 ; H01S003/19 ;
U.S. Cl.
CPC ...
Abstract

An electronic device substrate structure including a substratea metal thin filmas a (111)-oriented film of a face-centered cubic structure or as a (0001)-oriented film of a hexagonal closest packed structure formed on the substrateand a wurtzite type thin filmas a (0001)-oriented film of a wurtzite crystal structure formed on the metal thin filmwherein: each of the two thin films is a polycrystalline film containing at least two kinds of crystal grains different in direction of crystal orientation in the plane; when the metal thin filmis a (111)-oriented film, <11-20> axes in the plane of the wurtzite type thin filmare parallel to <1-10> axes in the plane of the metal thin filmand when the metal thin filmis a (0001)-oriented film, <11-20> axes in the plane of the wurtzite type thin filmare parallel to <11-20> axes in the plane of the metal thin film


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