The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 15, 2005

Filed:

Jul. 01, 2002
Applicants:

Kiyoharu Yamashita, Neyagawa, JP;

Kazuo Ikeda, Hirakata, JP;

Shunichi Seki, Amagasaki, JP;

Mitsuhiro Furukawa, Kobe, JP;

Inventors:

Kiyoharu Yamashita, Neyagawa, JP;

Kazuo Ikeda, Hirakata, JP;

Shunichi Seki, Amagasaki, JP;

Mitsuhiro Furukawa, Kobe, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L021/302 ; H01L021/461 ;
U.S. Cl.
CPC ...
Abstract

Provided is a method of manufacturing surface acoustic wave (SAW) devices having a first conductive pattern and a second conductive pattern of different thicknesses on one piezoelectric substrate. Combination of a plurality of steps of forming metal films and etching steps allows accurate production of SAW devices having a plurality of electrodes of different thicknesses on one piezoelectric substrate.


Find Patent Forward Citations

Quick Actions:

Yamashita, Kiyoharu. (2005). Method for manufacturing surface acoustic wave device (U.S. Patent No. 6855637). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6855637

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…