The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2005
Filed:
May. 29, 2003
Naoki Idani, Kawasaki, JP;
Naoki Idani, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A designing method of an electronic device is provided. An STI structure, a wiring structure and the like defines a first area ratio range and a second area ratio range that are permissible in order to obtain satisfactory polishing results. A region to be polished is divided into first smaller areas, an area ratio of each of which is adjusted to meet the first area ratio range. The region to be polished is divided into second smaller areas, which are larger than the first smaller areas. An area ratio of each is adjusted to meet the second area ratio range, thereby providing satisfactory planarity of the region to be polished without producing depressions due to erosion caused by differing polishing speeds caused by differing densities of the regions to be polished.