The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2005
Filed:
Aug. 02, 2001
Hiroyuki Tomita, Tochigi, JP;
Hiroyuki Tomita, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
This invention is to sufficiently reduce a change in optical characteristic of an optical system due to gas mixture in each space in the optical system and to resolve a pattern image with a small line width. A projection optical system () has lenses () as a plurality of optical elements, a holding member () for holding the lenses, and a lens barrel () serving as a vessel for accommodating the lenses () and holding member (). The lens barrel () has at least two spaces () inside. A gas contained in one space () has a refractive index different from that of a gas contained in the other space (). The pressure of the gas in one space () is different from that of the gas in the other space. The vessel () has gas supply ports () for independently supplying the gases into the two spaces () and gas exhaust ports () for exhausting the gases.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile