Multi-directional mirror device and method for optical inspection and autofocus measurement of objects

Abstract

The upper end of an elongate, rigid, mirror supporting arm is releasably secured at its upper end to an orientation ring, which is removably and rotatably mounted on the lower, cylindrically shaped end of the objective lens housing of an optical autofocus measurement system. The arm extends at its lower end beneath the housing and has secured thereon a mirror which is spaced beneath the housing, and lies in a plane that intersects and is inclined relative to the optical axis of the optical system contained in the housing. The mirror faces the surface of an object disposed in an object plane spaced laterally from the optical axis of the lens system, so that the system is focused along a supplemental optical axis which is inclined to, and intersects, the optical axis of the system in the housing. Images of the object in the offset object plane are therefore projected along the supplemental axis and then from the mirror to the optical system along its optical axis. This system enables a method of effecting autofocus measurements of an object placed in a first object plane that is intersected by the system optical axis when the mirror arm is removed from the lens housing, and, which also enables autofocusing of object surfaces in a second object plane when the mirror is attached by the arm to the lens housing.