The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 08, 2005

Filed:

May. 10, 2001
Applicants:

Masao Okubo, Nishinomiya, JP;

Kazumasa Okubo, Kanagawa-ken, JP;

Hiroshi Iwata, Kyoto-fu, JP;

Inventors:

Masao Okubo, Nishinomiya, JP;

Kazumasa Okubo, Kanagawa-ken, JP;

Hiroshi Iwata, Kyoto-fu, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R031/02 ;
U.S. Cl.
CPC ...
Abstract

Purpose: To present a vertical probe card capable of reusing without replacing a broken probe if a probe is broken. Constitution: A vertical probe card having vertical probes, being used in measurement of electric characteristics of an LSI chipto be measured, comprising a main substrateforming conductive patterns, a plurality of probesdrooping vertically from the main substrate, and a probe supportprovided at the back side of the main substratefor supporting the probes, in which the probe supportis disposed parallel to the main substrate, and has an upper guide plateand a lower guide platefor supporting the probesby passing the through-holesopened in each, and the lower guide plateis composed of three substratesA,B,C laminated separably.


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