The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 08, 2005

Filed:

Jun. 28, 2001
Applicants:

Butrus Thomas Khuri-yakub, Palo Alto, CA (US);

Fahrettin Levent Degertekin, Atlanta, GA (US);

Arif Sanli Ergun, Mountain View, CA (US);

Inventors:

Butrus Thomas Khuri-Yakub, Palo Alto, CA (US);

Fahrettin Levent Degertekin, Atlanta, GA (US);

Arif Sanli Ergun, Mountain View, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L029/82 ;
U.S. Cl.
CPC ...
Abstract

The present invention provides an apparatus and method for a new class of micro-machined electromechanical devices that make use of vibrating membranes. The electromechanical devices include two or more electrodes which are positioned with a membrane. A gap exists between the membrane and each electrode which may vary for each electrode. In general, one electrode is used as an input electrode which receives an electrical signal that causes vibration of the membrane. The vibration of the membrane is then coupled to a receiving or an output electrode. A DC bias voltage is applied to the electrodes to set or modify a width of a gap in the electromechanical device. The electromechanical device could be designed as a transformer, a capacitor, a resonator or a filter. In addition, the device includes a control voltage to dynamically change the coupling between the input electrode and the output electrode(s).


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