The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2005
Filed:
Feb. 13, 2003
Applicants:
Takahiro Kumauchi, Hamura, JP;
Makoto Yoshida, Ome, JP;
Kazuhiko Kajigaya, Iruma, JP;
Inventors:
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L021/338 ;
U.S. Cl.
CPC ...
Abstract
Oxidation on the surface of a film of refractory metal constituting a gate electrode (word line WL) is suppressed by forming an insulation film constituting a cap insulation film of the gate electrode (word line WL) at a temperature of 500° C. or lower. Further, oxidation on the surface of the refractory metal film exposed to the side wall of the gate electrode (word line WL) is suppressed by forming an insulation film constituting the side wall spacer of the gate electrode (word line WL) at a temperature of 500° C. or lower.